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| 008 | 060503m20069999xxua^^^^^^^^^^000^0^eng^^ | ||
| 020 | _a0-8493-2106-9 (papel alcalino) | ||
| 035 | _aMX001001055879 | ||
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_aTK7875 _bM45 2006 |
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_a621.381 _222 |
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_aMEMS / _cedited by Mohamed Gad-El-Hak |
| 250 | _a2nd ed. | ||
| 264 | 1 |
_aBoca Raton, Florida : _bCRC Press/Taylor & Francis, _c2006- |
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| 300 |
_avolúmenes : _bilustraciones |
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| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 490 | 0 | _aThe MEMS handbook | |
| 490 | 0 | _aMechanical engineering series | |
| 505 | 1 | _aContenido: Introduction and fundamentals -- Design and fabrication -- Applications | |
| 650 | 0 | _aSistemas microelectromecánicos | |
| 650 | 0 |
_aSistemas microelectromecánicos _xDiseño y construcción |
|
| 650 | 0 | _aMicrofabricación | |
| 700 | 1 |
_aGad-el-Hak, Mohamed, _d1945- _eeditor |
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| 830 | 0 |
_aMechanical engineering series _x0941-5122 |
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| 999 |
_c5057 _d5057 |
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