000 00818nam a2200217 a 4500
008 050819s2005^^^^xxua^^^^^^^^^^000^0^eng^d
020 _a0-8493-2838-1 (papel alcalino)
035 _aMX001001036591
040 _aUNAMX
_bspa
_cUNAMX
_dUNAMX
050 4 _aTK7875
_bL97 2005
100 1 _aLyshevski, Sergey Edward,
_eautor
245 1 0 _aNano- and microelectromechanical system :
_bfundamentals of nano- and microengineering /
_cSergey Edward Lyshevski
250 _a2nd ed.
264 1 _aBoca Raton, Florida :
_bCRC Press,
_cc2005
300 _a722 páginas :
_bilustraciones
336 _atexto
_2rdacontent
337 _asin medio
_2rdamedia
338 _avolumen
_2rdacarrier
490 0 _aNano- and microscience, engineering, technology, and medicine series
650 4 _aSistemas microelectromecánicos
999 _c4837
_d4837