TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - Nano- and microelectromechanical system: fundamentals of nano- and microengineering 
T2  - Nano- and microscience, engineering, technology, and medicine series
SN  - 0-8493-2838-1 (papel alcalino)
AV  - TK7875 L97 2005
PY  - 2005///
CY  - Boca Raton, Florida
PB  - CRC Press
KW  - Sistemas microelectromecánicos
ER  -