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Lyshevski, Sergey Edward,

Nano- and microelectromechanical system : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - 2nd ed. - 722 páginas : ilustraciones - Nano- and microscience, engineering, technology, and medicine series .

ISBN: 0-8493-2838-1 (papel alcalino)

Subjects--Topical Terms:
Sistemas microelectromecánicos

LC Class. No.: TK7875 / L97 2005